Development of Sandwich AlN on PSS via Layered V/III Ratio Optimization

İsmail Altuntas; Ferhan Kübra Özbakır

doi:10.17776/csj.1698209

Development of Sandwich AlN on PSS via Layered V/III Ratio Optimization

Abstract

This study presents a comprehensive investigation into the effects of layer-by-layer V/III ratio optimization on the structural, optical, and morphological properties of AlN films grown on patterned sapphire substrates (PSS) using the PALE technique. A sandwich structure was designed by sequentially applying low and high ammonia flows. Among the samples, the two-layer Sample B, grown with a low V/III ratio followed by a high one, exhibited the best crystalline quality, as indicated by the narrowest peaks in rocking curve analyses. In contrast, Sample A, grown as a single layer with a low V/III ratio, maintained the substrate’s pattern geometry but showed increased structural irregularities due to limited vertical growth. Sample C, despite having a sandwich configuration, showed inferior surface and boundary morphology because the growth started under low ammonia flow, which negatively impacted crystalline alignment. Reflectance measurements revealed no significant shift in the band edge positions across the samples, indicating similar bandgap energies. However, the rougher surface morphology of Sample C led to slightly enhanced light scattering in the ultraviolet range, suggesting a less uniform optical surface. These findings demonstrate that carefully tuned V/III ratio sequencing—considering layer thickness and interface stability—can significantly enhance both the crystalline and surface quality of AlN/PSS heterostructures.

Keywords

Project Number

TUBİTAK-118F425

References

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Details

Primary Language

English

Subjects

Nonlinear Optics and Spectroscopy

Journal Section

Research Article

Authors

İsmail Altuntas ^*
0000-0002-3979-7868
Türkiye

Ferhan Kübra Özbakır
0000-0002-3691-7983
Türkiye

Publication Date

December 30, 2025

Submission Date

May 13, 2025

Acceptance Date

November 28, 2025

Published in Issue

Year 2025 Volume: 46 Number: 4

DOI

https://doi.org/10.17776/csj.1698209

IZ

https://izlik.org/JA83MX34CW

Cite

RIS / Bibtex

APA

Altuntas, İ., & Özbakır, F. K. (2025). Development of Sandwich AlN on PSS via Layered V/III Ratio Optimization. Cumhuriyet Science Journal, 46(4), 967-973. https://doi.org/10.17776/csj.1698209