Superlattice Structure of Quantum Cascade Lasers: Structural and Morphological Effects of AsH₃ Flow

Merve Nur Koçak; İlkay Demir

doi:10.17776/csj.1672170

EN

Superlattice Structure of Quantum Cascade Lasers: Structural and Morphological Effects of AsH₃ Flow

Abstract

The quantum cascade lasers (QCLs) have been widely used in mid-infrared applications due to their high power, efficiency, and design flexibility. The InP-based quantum cascade lasers, particularly those utilizing In 0.53 Ga 0.47 As/In0.52Al0.48As superlattices, have been preferred for their lattice compatibility and well-established fabrication processes. However, the superlattice growth has required optimization, as relaxation mechanisms have affected structural quality beyond the critical thickness. In this study, InP-based quantum cascade lasers structures have been grown and characterized using Metal-Organic Vapor Phase Epitaxy (MOVPE). The impact of AsH3 (arsin) flow rate on superlattice quality has been investigated by growing samples with flow rates of 47 sccm, 60 sccm, and 75 sccm. Structural analysis has been conducted using high-resolution X-ray diffraction (HRXRD), while atomic force microscopy (AFM) has been used to examine surface morphology. The results obtained revealed the critical role of superlattice growth parameters on the performance of quantum cascade laser devices and provided important findings for determining the optimal AsH₃ flow rate. This study contributes to the improvement of growth processes of InP-based quantum cascade laser structures, leading to improved semiconductor laser performance.

Keywords

Supporting Institution

The Scientific Research Project Fund of Sivas Cumhuriyet University, Turkey under the Project number MRK-2024-004 and TUBITAK under the Project number 22AG074.

Project Number

MRK-2024-004 and 22AG074.

References

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Details

Primary Language

English

Subjects

Photonics, Optoelectronics and Optical Communications

Journal Section

Research Article

Authors

Merve Nur Koçak
0000-0002-4913-5614
Türkiye

İlkay Demir ^*
0000-0002-2224-989X
Türkiye

Publication Date

June 30, 2025

Submission Date

April 9, 2025

Acceptance Date

June 14, 2025

Published in Issue

Year 2025 Volume: 46 Number: 2

DOI

https://doi.org/10.17776/csj.1672170

IZ

https://izlik.org/JA68XT52CZ

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RIS / Bibtex

APA

Koçak, M. N., & Demir, İ. (2025). Superlattice Structure of Quantum Cascade Lasers: Structural and Morphological Effects of AsH₃ Flow. Cumhuriyet Science Journal, 46(2), 384-389. https://doi.org/10.17776/csj.1672170

Öz

Superlattice Structure of Quantum Cascade Lasers: Structural and Morphological Effects of AsH₃ Flow

Abstract

Keywords

Supporting Institution

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References

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Published in Issue

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