Production of GeOx Films at Different Oxygen Flow Rates and Different Annealing Temperatures and Examination of Energy Band Gaps using Kubelka Munk Method

Ayfer Özdemir; Şahide Gülizar Kızıl; Ebru Senadim Tuzemen

doi:10.17776/csj.1482632

EN

Production of GeOx Films at Different Oxygen Flow Rates and Different Annealing Temperatures and Examination of Energy Band Gaps using Kubelka Munk Method

Abstract

In this study, GeOx films were grown on silicon substrates using the Radio Frequency (RF) Magnetron Sputtering method at different oxygen flow rates and annealing temperatures. The films were produced at a substrate temperature of 250°C and a working pressure of 13 mTorr. Subsequently, the films were annealed at temperatures of 300°C, 500°C, 600°C, 700°C, 900°C, and 1000°C. Total and diffuse reflection measurements were performed to investigate the optical properties of the films. Energy band gaps were determined using diffuse reflection measurements and they were calculated using the Kubelka-Munk method. It was observed that the energy band gap increased with increasing oxygen ratio. Additionally, annealing temperatures were found to cause changes in the energy band gaps.

Keywords

Project Number

This study is supported by TÜBİTAK 2209-A University Students Research Projects, No. 2209-A Tübitak-1919B012108759.

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Details

Primary Language

English

Subjects

Atomic, Molecular and Optical Physics (Other) , Material Physics

Journal Section

Research Article

Authors

Ayfer Özdemir
0009-0007-4573-5587
Türkiye

Şahide Gülizar Kızıl
Türkiye

Ebru Senadim Tuzemen ^*
Türkiye

Publication Date

September 30, 2024

Submission Date

May 12, 2024

Acceptance Date

August 21, 2024

Published in Issue

Year 2024 Volume: 45 Number: 3

DOI

https://doi.org/10.17776/csj.1482632

IZ

https://izlik.org/JA49HY94UM

Cite

RIS / Bibtex

APA

Özdemir, A., Kızıl, Ş. G., & Senadim Tuzemen, E. (2024). Production of GeOx Films at Different Oxygen Flow Rates and Different Annealing Temperatures and Examination of Energy Band Gaps using Kubelka Munk Method. Cumhuriyet Science Journal, 45(3), 598-603. https://doi.org/10.17776/csj.1482632