Influence of The Substrate-Target Angle and Sputter Temperature On The Properties of CIGS Thin Films Sputtered From Single Quaternary Target

Filiz Keleş; Furkan Güçlüer

doi:10.17776/csj.1242731

EN

Influence of The Substrate-Target Angle and Sputter Temperature On The Properties of CIGS Thin Films Sputtered From Single Quaternary Target

Abstract

In this study, Copper Indium Gallium Selenide (CIGS) thin films were successfully sputtered from a single quaternary target onto soda lime glass substrates. The effect of the incident angle of target atoms and sputter temperature on the properties of the films were examined using various techniques. It was found that a higher incident angle of target atoms resulted in a columnar microstructure, while a lower angle produced a solid film. The columnar structure showed improved optical absorption compared to the solid film. The sputter temperature had a greater effect on the crystalline properties of the films, with all films except those sputtered at room temperature showing polycrystalline formation. The films displayed a chalcopyrite structure and acceptable band gaps in the range of 1.1-1.3 eV, regardless of the incident angle and sputter temperature. These results indicate that the optical properties of CIGS thin films can be improved by a small increase in the incident angle of target atoms, without adversely affecting the structural and crystalline properties.

Keywords

References

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Details

Primary Language

English

Subjects

Classical Physics (Other) , Material Production Technologies

Journal Section

Research Article

Authors

Filiz Keleş ^*
0000-0003-4548-489X
Türkiye

Furkan Güçlüer
0000-0002-8708-8994
Türkiye

Publication Date

June 30, 2023

Submission Date

January 31, 2023

Acceptance Date

April 6, 2023

Published in Issue

Year 2023 Volume: 44 Number: 2

DOI

https://doi.org/10.17776/csj.1242731

IZ

https://izlik.org/JA23JW73UY

Cite

RIS / Bibtex

APA

Keleş, F., & Güçlüer, F. (2023). Influence of The Substrate-Target Angle and Sputter Temperature On The Properties of CIGS Thin Films Sputtered From Single Quaternary Target. Cumhuriyet Science Journal, 44(2), 396-402. https://doi.org/10.17776/csj.1242731

Influence of The Substrate-Target Angle and Sputter Temperature On The Properties of CIGS Thin Films Sputtered From Single Quaternary Target

Öz

Anahtar Kelimeler

Influence of The Substrate-Target Angle and Sputter Temperature On The Properties of CIGS Thin Films Sputtered From Single Quaternary Target

Abstract

Keywords

References

Details

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Authors

Publication Date

Submission Date

Acceptance Date

Published in Issue

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