Growth Temperature Dependency of High Al Content AlGaN Epilayers on AlN/Al2O3 Templates

İlkay Demir

doi:10.17776/csj.453576

EN TR

Growth Temperature Dependency of High Al Content AlGaN Epilayers on AlN/Al2O3 Templates

Abstract

In this work, MOVPE (Metalorganic Vapor Phase Epitaxy) growth and characterization studies of high Al content AlGaN epilayers are reported. We utilize high resolution X-ray diffraction (HRXRD) and atomic force microscope (AFM) techniques to analyze the crystalline quality and surface morphology of AlGaN epilayers. The role of the growth temperature of AlGaN epilayers on the structural quality and the surface morphology was investigated. Growth and measurement results show that single phase AlGaN epilayers were grown on AlN/Al₂O₃ template. It is concluded that the increasing growth temperature increases the Al content of AlGaN epilayers which enable to control the alloy concentration of AlGaN. Furthermore, the increasing Al content in AlGaN epilayers leads to the smooth surface which indicates that the decreasing number of dislocation density.

Keywords

AlGaN,MOVPE,AlN,Al2O3,X-ray diffraction,Atomic force microscope

References

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Details

Primary Language

English

Subjects

-

Journal Section

Research Article

Authors

İlkay Demir ^*
Türkiye

Publication Date

September 30, 2018

Submission Date

August 14, 2018

Acceptance Date

September 4, 2018

Published in Issue

Year 1970 Volume: 39 Number: 3

DOI

https://doi.org/10.17776/csj.453576

IZ

https://izlik.org/JA67NN96XK

Cite

RIS / Bibtex

APA

Demir, İ. (2018). Growth Temperature Dependency of High Al Content AlGaN Epilayers on AlN/Al2O3 Templates. Cumhuriyet Science Journal, 39(3), 728-733. https://doi.org/10.17776/csj.453576

Growth Temperature Dependency of High Al Content AlGaN Epilayers on AlN/Al2O3 Templates

Growth Temperature Dependency of High Al Content AlGaN Epilayers on AlN/Al2O3 Templates

Abstract

Keywords

AlN/Al2O3 Şablonlar Üzerindeki Yüksek Al İçerikli AlGaN epi-Tabakaların Büyütme Sıcaklığı Bağımlılığı

Öz

Anahtar Kelimeler

References

Details

Primary Language

Subjects

Journal Section

Authors

Publication Date

Submission Date

Acceptance Date

Published in Issue

DOI

IZ

Cite

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Nucleation layer temperature effect on AlN epitaxial layers grown by metalorganic vapour phase epitaxy