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n-Si ve PET alttaşlar üzerine RF-kaplanan GZO ince filmlere tavlama sıcaklığının etkileri

Year 2019, Volume: 34 Issue: 4, 1757 - 1764, 25.06.2019

Nihan Akın Sönmez Meltem Dönmez Buse Cömert Tarık Asar Barış Kınacı Süleyman Özçelik

https://doi.org/10.17341/gazimmfd.571538

Abstract

Mikro
takımların uç nokta Frekans Tepki Fonksiyonları (FTF) darbe testi ve modal
(biçim) analizi vasıtası ile belirlenememektedir. Ayrıca, mikro işlemler yüksek
hızlarda gerçekleştirilmekte ve jiroskopik momentler ve merkezkaç kuvvetleri
nedeniyle takım uç nokta FTF’sinde değişimler meydana gelmektedir. Bu
çalışmada, mikro takımlar kesici uç geometrisini ve operasyon etkilerini
içerecek şekilde analitik olarak modellenmiştir. Ayrıca, iş mili geometrisinin
bilinmediği durumlar için deneysel olarak elde edilen durağan iş mili dinamiği
ve analitik olarak hesaplanan dönen takım ve tutucu dinamiğinin
birleştirilmesini mümkün kılan yeni bir yöntem geliştirilmiştir.

Keywords

Galyum katkılı çinko oksit tavlama UV sensör

References

  • 1. Manouni A. El., Manjon F.J., Perales M., Mollar M., Mari B., Lopez M.C., Ramos Barrado J.R., Effect of thermal annealing on ZnO: Al thin films grown by spray pyrolysis, Superlatt. Microstruct. 42, 134-139, 2007.
  • 2. Akin N., Baskose U.C., Kinaci B., Cakmak M., Ozcelik S., AZO thin film-based UV sensors: effects of RF power on the films, Appl. Phys. A. 119, 965-970, 2015.
  • 3. Gong L., Lu J., Ye Z., Transparent and conductive Ga-doped ZnO films grown by RF magnetron sputtering on polycarbonate substrates, Sol. Energy Mater. Sol. Cells. 94, 937-941, 2010.
  • 4. Kao J.Y., Hsu C.Y., Chen G.C., Wen D.C., The characteristics of transparent conducting Al-doped zinc oxide thin films deposited on polymer substrates, J Mater Sci: Mater Electron, 23, 1352-1360, 2012.
  • 5. Lee J., Lee D., Lim D., Yang K., Structural, electrical and optical properties of ZnO: Al films deposited on flexible organic substrates for solar cell applications, Thin Solid Films, 515, 6094-6098, 2007.
  • 6. Wang X., Zeng X., Huang D., Zhang X., Li Q., The properties of Al doped ZnO thin films deposited on various substrate materials by RF magnetron sputtering, J Mater Sci: Mater Electron, 23, 1580-1586, 2012.
  • 7. Hao X., Ma J., Zhang D., Yang T., Ma H., Yang Y., Cheng C., Huang J., Thickness dependence of structural, optical and electrical properties of ZnO: Al films prepared on flexible substrates, Appl. Surf. Sci., 183, 137-142, 2001.
  • 8. Kim J.M., Thiyagarajan P., Rhee S.W., Deposition of Al-doped ZnO films on polyethylene naphthalate substrate with radio frequency magnetron sputtering, Thin Solid Films, 518, 5860-5865, 2010.
  • 9. Panda S.K., Jacob C., Preparation of transparent ZnO thin films and their application in UV sensor devices, Solid-State Electronics, 73, 44-50, 2012.
  • 10. Comert B., Akin N., Donmez M., Saglam S., Ozcelik S., Titanium Dioxide Thin Films as Methane Gas Sensors, IEEE Sensors Journal, 16, 8890-8896, 2016.
  • 11. Akin N., Kinaci B., Ozen Y., Ozcelik S., Influence of RF power on the opto-electrical and structural properties of gallium-doped zinc oxide thin films, J Mater Sci: Mater Electron, 28, 7376-7384, 2017.
  • 12. Klug H.P., Alexander L.E., X-ray Diffraction Procedures, Wiley, New York. 1974.
  • 13. Kim, M.S., Yim, K.G., Cho, M.Y., Leem, J.Y., Lee, D.Y., Kim, J.S., Kim, J.S., Son, J.S., Post-Annealing Effects on the Structural and the Optical Properties of ZnO Thin Films Grown by Using the Hydrothermal Method, Journal of the Korean Physical Society, 58, 3, 2011.
  • 14. Sengupta J., Sahoo R.K., Mukherjee C.D., Effect of annealing on the structural, topographical and optical properties of sol–gel derived ZnO and AZO thin films. Materials Letters, 83, 84-87, 2012.
  • 15. Tsay C.Y., Wu C.W., Lei C.M., Chen F.S., Lin C.K., Microstructural and optical properties of Ga-doped ZnO semiconductor thin films prepared by sol–gel process, Thin Solid Films, 519 (5), 1516-1520, 2010.
  • 16. Park S.M., Ikegami T., Ebihara K., Effects of substrate temperature on the properties of Ga-doped ZnO by pulsed laser deposition, Thin Solid Films, 513 (1), 90-94, 2006.
  • 17. Rao T.P., Kumar M.S., Hussain N.S., Effects of thickness and atmospheric annealing on structural, electrical and optical properties of GZO thin films by spray pyrolysis, Journal of Alloys and Compounds, 541, 495-504, 2012.
  • 18. Gonçalves G., Elangovan E., Barquinha P., Pereira L., Martins R., Fortunato E., Influence of post-annealing temperature on the properties exhibited by ITO, IZO and GZO thin films, Thin Solid Films, 515 (24), 8562-8566, 2007.
  • 19. Huafu Z., Chengxin L., Hanfa L., Changkun Y., Influence of the sputtering pressure on the properties of transparent conducting zirconium doped zinc oxide films prepared by RF magnetron sputtering, J. Semicond., 30, 41-44, 2009.
  • 20. Zhong A., Tan J., Huang H., Chen S., Wang M., Xu S., Thickness effect on the evolution of morphology and optical properties of ZnO films, App. Surf. Sci. 257, 4051-4055, 2011.
  • 21. Hu Z.Q., Deng H., Xie J., Li Y., Zu X.T., Ultraviolet photoconductive detector based on Al doped ZnO films prepared by sol-gel method, App. Surf. Sci. 253, 476-479, 2006.
  • 22. Mohite S.V., Rajpure K.Y., Synthesis and characteriztion of Sb doped ZnO thin films for photodetector application, Optical Materials 36, 833-838, 2014.

Year 2019, Volume: 34 Issue: 4, 1757 - 1764, 25.06.2019

Nihan Akın Sönmez Meltem Dönmez Buse Cömert Tarık Asar Barış Kınacı Süleyman Özçelik

https://doi.org/10.17341/gazimmfd.571538

Abstract

References

  • 1. Manouni A. El., Manjon F.J., Perales M., Mollar M., Mari B., Lopez M.C., Ramos Barrado J.R., Effect of thermal annealing on ZnO: Al thin films grown by spray pyrolysis, Superlatt. Microstruct. 42, 134-139, 2007.
  • 2. Akin N., Baskose U.C., Kinaci B., Cakmak M., Ozcelik S., AZO thin film-based UV sensors: effects of RF power on the films, Appl. Phys. A. 119, 965-970, 2015.
  • 3. Gong L., Lu J., Ye Z., Transparent and conductive Ga-doped ZnO films grown by RF magnetron sputtering on polycarbonate substrates, Sol. Energy Mater. Sol. Cells. 94, 937-941, 2010.
  • 4. Kao J.Y., Hsu C.Y., Chen G.C., Wen D.C., The characteristics of transparent conducting Al-doped zinc oxide thin films deposited on polymer substrates, J Mater Sci: Mater Electron, 23, 1352-1360, 2012.
  • 5. Lee J., Lee D., Lim D., Yang K., Structural, electrical and optical properties of ZnO: Al films deposited on flexible organic substrates for solar cell applications, Thin Solid Films, 515, 6094-6098, 2007.
  • 6. Wang X., Zeng X., Huang D., Zhang X., Li Q., The properties of Al doped ZnO thin films deposited on various substrate materials by RF magnetron sputtering, J Mater Sci: Mater Electron, 23, 1580-1586, 2012.
  • 7. Hao X., Ma J., Zhang D., Yang T., Ma H., Yang Y., Cheng C., Huang J., Thickness dependence of structural, optical and electrical properties of ZnO: Al films prepared on flexible substrates, Appl. Surf. Sci., 183, 137-142, 2001.
  • 8. Kim J.M., Thiyagarajan P., Rhee S.W., Deposition of Al-doped ZnO films on polyethylene naphthalate substrate with radio frequency magnetron sputtering, Thin Solid Films, 518, 5860-5865, 2010.
  • 9. Panda S.K., Jacob C., Preparation of transparent ZnO thin films and their application in UV sensor devices, Solid-State Electronics, 73, 44-50, 2012.
  • 10. Comert B., Akin N., Donmez M., Saglam S., Ozcelik S., Titanium Dioxide Thin Films as Methane Gas Sensors, IEEE Sensors Journal, 16, 8890-8896, 2016.
  • 11. Akin N., Kinaci B., Ozen Y., Ozcelik S., Influence of RF power on the opto-electrical and structural properties of gallium-doped zinc oxide thin films, J Mater Sci: Mater Electron, 28, 7376-7384, 2017.
  • 12. Klug H.P., Alexander L.E., X-ray Diffraction Procedures, Wiley, New York. 1974.
  • 13. Kim, M.S., Yim, K.G., Cho, M.Y., Leem, J.Y., Lee, D.Y., Kim, J.S., Kim, J.S., Son, J.S., Post-Annealing Effects on the Structural and the Optical Properties of ZnO Thin Films Grown by Using the Hydrothermal Method, Journal of the Korean Physical Society, 58, 3, 2011.
  • 14. Sengupta J., Sahoo R.K., Mukherjee C.D., Effect of annealing on the structural, topographical and optical properties of sol–gel derived ZnO and AZO thin films. Materials Letters, 83, 84-87, 2012.
  • 15. Tsay C.Y., Wu C.W., Lei C.M., Chen F.S., Lin C.K., Microstructural and optical properties of Ga-doped ZnO semiconductor thin films prepared by sol–gel process, Thin Solid Films, 519 (5), 1516-1520, 2010.
  • 16. Park S.M., Ikegami T., Ebihara K., Effects of substrate temperature on the properties of Ga-doped ZnO by pulsed laser deposition, Thin Solid Films, 513 (1), 90-94, 2006.
  • 17. Rao T.P., Kumar M.S., Hussain N.S., Effects of thickness and atmospheric annealing on structural, electrical and optical properties of GZO thin films by spray pyrolysis, Journal of Alloys and Compounds, 541, 495-504, 2012.
  • 18. Gonçalves G., Elangovan E., Barquinha P., Pereira L., Martins R., Fortunato E., Influence of post-annealing temperature on the properties exhibited by ITO, IZO and GZO thin films, Thin Solid Films, 515 (24), 8562-8566, 2007.
  • 19. Huafu Z., Chengxin L., Hanfa L., Changkun Y., Influence of the sputtering pressure on the properties of transparent conducting zirconium doped zinc oxide films prepared by RF magnetron sputtering, J. Semicond., 30, 41-44, 2009.
  • 20. Zhong A., Tan J., Huang H., Chen S., Wang M., Xu S., Thickness effect on the evolution of morphology and optical properties of ZnO films, App. Surf. Sci. 257, 4051-4055, 2011.
  • 21. Hu Z.Q., Deng H., Xie J., Li Y., Zu X.T., Ultraviolet photoconductive detector based on Al doped ZnO films prepared by sol-gel method, App. Surf. Sci. 253, 476-479, 2006.
  • 22. Mohite S.V., Rajpure K.Y., Synthesis and characteriztion of Sb doped ZnO thin films for photodetector application, Optical Materials 36, 833-838, 2014.
There are 22 citations in total.

Details

Primary Language Turkish
Subjects Engineering
Journal Section Makaleler
Authors

Nihan Akın Sönmez 0000-0002-2609-9657

Meltem Dönmez This is me 0000-0002-6575-7632

Buse Cömert This is me 0000-0002-0469-5589

Tarık Asar 0000-0002-2430-0599

Barış Kınacı This is me

Süleyman Özçelik 0000-0002-3761-3711

Publication Date June 25, 2019
Submission Date January 31, 2018
Published in Issue Year 2019 Volume: 34 Issue: 4

Cite

APA Akın Sönmez, N., Dönmez, M., Cömert, B., Asar, T., et al. (2019). n-Si ve PET alttaşlar üzerine RF-kaplanan GZO ince filmlere tavlama sıcaklığının etkileri. Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi, 34(4), 1757-1764. https://doi.org/10.17341/gazimmfd.571538
AMA Akın Sönmez N, Dönmez M, Cömert B, Asar T, Kınacı B, Özçelik S. n-Si ve PET alttaşlar üzerine RF-kaplanan GZO ince filmlere tavlama sıcaklığının etkileri. GUMMFD. June 2019;34(4):1757-1764. doi:10.17341/gazimmfd.571538
Chicago Akın Sönmez, Nihan, Meltem Dönmez, Buse Cömert, Tarık Asar, Barış Kınacı, and Süleyman Özçelik. “N-Si Ve PET alttaşlar üzerine RF-Kaplanan GZO Ince Filmlere Tavlama sıcaklığının Etkileri”. Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi 34, no. 4 (June 2019): 1757-64. https://doi.org/10.17341/gazimmfd.571538.
EndNote Akın Sönmez N, Dönmez M, Cömert B, Asar T, Kınacı B, Özçelik S (June 1, 2019) n-Si ve PET alttaşlar üzerine RF-kaplanan GZO ince filmlere tavlama sıcaklığının etkileri. Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi 34 4 1757–1764.
IEEE N. Akın Sönmez, M. Dönmez, B. Cömert, T. Asar, B. Kınacı, and S. Özçelik, “n-Si ve PET alttaşlar üzerine RF-kaplanan GZO ince filmlere tavlama sıcaklığının etkileri”, GUMMFD, vol. 34, no. 4, pp. 1757–1764, 2019, doi: 10.17341/gazimmfd.571538.
ISNAD Akın Sönmez, Nihan et al. “N-Si Ve PET alttaşlar üzerine RF-Kaplanan GZO Ince Filmlere Tavlama sıcaklığının Etkileri”. Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi 34/4 (June 2019), 1757-1764. https://doi.org/10.17341/gazimmfd.571538.
JAMA Akın Sönmez N, Dönmez M, Cömert B, Asar T, Kınacı B, Özçelik S. n-Si ve PET alttaşlar üzerine RF-kaplanan GZO ince filmlere tavlama sıcaklığının etkileri. GUMMFD. 2019;34:1757–1764.
MLA Akın Sönmez, Nihan et al. “N-Si Ve PET alttaşlar üzerine RF-Kaplanan GZO Ince Filmlere Tavlama sıcaklığının Etkileri”. Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi, vol. 34, no. 4, 2019, pp. 1757-64, doi:10.17341/gazimmfd.571538.
Vancouver Akın Sönmez N, Dönmez M, Cömert B, Asar T, Kınacı B, Özçelik S. n-Si ve PET alttaşlar üzerine RF-kaplanan GZO ince filmlere tavlama sıcaklığının etkileri. GUMMFD. 2019;34(4):1757-64.